DYNAMIC PERFORMANCE OF AN ELECTROMAGNETICALLY ACTUATED VALVELESS MICROPUMP

摘要

The dynamic performance of a valveless electromagnetic micropump is studied by a fluid-diaphragm coupling model. The model includes fluid inertia and considers the electromagnetic action on the flexible diaphragm of the pump as a sinusoidal force. Fluid pressure acting on the diaphragm is obtained instantaneously with solving the coupling equation through a transient dynamic mesh simulation. This treatment avoids omitting the phase shift between pressure force and displacement of the diaphragm. Furthermore, the model removes almost empirical parameters. A MEMS prototype is fabricated and the measured backpressure attains to 2.5cmH_2O when using a 65mA sinusoidal driving current at frequency of 30Hz.