Optimal structural design of micro-motion stage with stiffness constraints using topology and sizing optimization method

摘要

Flexure hinge is widely used in the compliant mechanisms for precision engineering. Generally, compliant mechanisms with flexure hinges are designed using the analytical stiffness formulas, which increases the design complexity. As the development of finite element analysis (FEA) and optimization methods, it is likely to design the flexure hinges directly using the FEA based numerical optimization methods. This paper developed a leaf spring type flexure hinge based micro-motion stage with specific stiffness constraints. Both topology and sizing optimization methods are used in the design of motion stage. The proposed methods is apply to optimal design formed the leaf spring type flexure hinge for a micro motion stage which serves as a guidance mechanism. Further numerical result shows the good stiffness stability of the refined stage.