Interrelation diffusion and mechanical waves at the initial stage of ion beam action on the metallic surface

摘要

The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into the metallic surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the stresses and strains arising as the result of particle impact on the substrate surface. The mathematical model was solved numerically. It was shown that impurity distribution differs essentially on the forecast of pure diffusion theory. This model could be useful for better understanding the interacting processes accompanying the mechanical and thermal fields evolution in treated materials.