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Combined optical and force microscopy of patterned magnetic films

机译:图案化磁膜的组合光力学显微镜

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Combined magneto-optic indicator film (MOIF) and magnetic force microscopy (MFM) is introduced as an advanced tool for the characterization of patterned ferromagnetic films. The MOIF technique combines quantitative stray field imaging of individual micron-sized magnetic elements with a large-area overview of the patterned film while MFM provides nanometer spatial resolution. In order to demonstrate the potential of this approach, lithographically patterned CoPt films with out-of-plane anisotropy were characterized. The large-scale MOIF images reveal variations of the magnetization state and the magnetization reversal among individual magnetic elements. Corresponding high-resolution MFM images relate these results to the micromagnetic configuration of the elements.
机译:结合磁光指示膜(MOIF)和磁力显微镜(MFM)作为用于图案化铁磁膜的表征的先进工具。 MOIF技术将各个微米尺寸磁性元件的定量杂散场成像与图案化膜的大面积概述相结合,而MFM提供纳米空间分辨率。为了证明这种方法的潜力,表征了具有外平面各向异性外各向异性的光刻图案化的COPT薄膜。大规模的MOIF图像在各个磁性元件中揭示磁化状态和磁化反转的变化。相应的高分辨率MFM图像将这些结果与元件的微磁性配置相关联。

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