Simulation and Experiment for Evanescent Light Enhancement in 30nm Apertures by Surface Plasmon on Nano-fabricated Metallic Grating Film over GaP for Ultrahigh Density Optical Head: A new application of nano-fabrication technology for ultrahigh density d

摘要

Fine metallic gratings made of gold film with nano-fabrication had been designed and fabricated for sell to enhance the near-field light waves emit from 30nm apertures for the throughput efficiency increment using the surface plasmon polariton resonance effect between the light inside the optical head and the nano-fabricated corrugated metal thin film, which is coated on the head surface. The theoretical analysis is discussed with the emphasis on the 2-D and 3-D simulation using the FDTD method. It is also experimentally shown that the near-field light from a 30nm aperture which is surrounded with the fine pitch corrugated gold thin film gets the resonant intensity enhancement. The important key of this technology is the nano-fabrication engineering, where narrower grooves of grating tooth, like a 10nm width metallic comb, are located inside GaP substrate and filled with nano gold perticles.