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LATEST MEMS DM DEVELOPMENTS AND THE PATHAHEAD AT IRIS AO, INC

机译:最新的MEMS DM开发和Iris Ao,Inc的Pathahead

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his AO currently fabricates 37-segment DMs with 5μm stroke, 3.5 mm inscribedaperture, and 2.3 kHz roll off frequency. The DMs are positioned with simplepiston/tip/tilt commands rather than nonlinear voltages by using a calibrated positioncontroller and calibrated drive electronics. Open-loop positioning errors of less than 30nm rms have been shown over the majority of the operating space using the calibratedcontroller. This paper will present an update of development at Iris AO on segmenteddeformable mirrors (DM), compact drive electronics, and control techniques for the DM.It will also describe current research directions geared towards making MEMS DMseasier to use and increasing performance while reducing cost.
机译:他的AO目前用5μm中风,3.5毫米内部狭窄和2.3 kHz滚动频率制造37段DMS。 DMS通过使用校准的位置控制器和校准的驱动电子器件,使用简单沉积物/尖端/倾斜命令而不是非线性电压定位。使用CalibratedController在大多数操作空间上显示了小于30nm rms的开环定位误差。本文将在虹膜AO上呈现开发的开发更新在分段IDEDEALIBLE镜(DM),紧凑型驱动电子器件和DM的控制技术。它还将描述当前的研究方向,用于制作MEMS DMSEAS使用和提高性能,同时降低成本。

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