Manufacturing of Functional Micro- and Nano-structured Plastic Components and Silicon Devices

摘要

We report on the development of two cost efficient hybrid manufacturing chains for the fabrication of micro- and nano-structured plastic components and silicon devices. In the approach proposed, self-assembly based structuring techniques and interference lithography have been developed for the low cost fabrication of micro- and nano-structured masters. These were used for replication into thermoplastics by hot-embossing and injection molding thus allowing the mass production of micro- nano-structured plastic components for biotech application. In addition, nanosphere and block copolymer lithography have been successfully combined with standard microfabrication processes for the wafer-scale production of suspended ultrathin silicon nitride membranes with tunable pore diameter from 80 to 500 nm for applications in ultrafiltration and molecule separation.