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A novel method and device for solder joint quality inspection by using laser ultrasound

机译:使用激光超声波焊接关节质量检测的一种新型方法和装置

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A novel, non-contact, non-destructive, on-line approach for flip chip, ball grid array (BGA), chip scale and micro BGA solder joint quality inspection is presented. In this technique, a pulsed laser generates ultrasound on the chip's surface, exciting die whole chip into a vibration motion. An interferometer was used to measure the vibration displacement of the chip's surface. Changes of solder joint quality produce different vibration responses. A signal-processing algorithm was developed to measure the difference between a good chip and chip with defects, both in time domain and frequency domain. The inspection system was characterized, and results are presented for two cases of flip chips with missing solder balls. Results indicate that this laser ultrasonic/interferometeric system offers great promise for solder bump inspection in flip chip, BGA, chip scale and micro BGA packages.
机译:提出了一种新颖的,非接触,非破坏性,用于倒装芯片,球栅阵列(BGA),芯片级和微BGA焊接关节质量检测的线路接近的在线方法。在这种技术中,脉冲激光在芯片表面上产生超声波,将整个芯片促进整个芯片成振动运动。干涉仪用于测量芯片表面的振动位移。焊点质量的变化产生不同的振动响应。开发了一种信号处理算法,用于测量时域和频域中的缺陷件的良好芯片和芯片之间的差异。检查系统的特征在于,并提出了两种焊球的翻转芯片的结果。结果表明,该激光超声/干涉仪系统在倒装芯片,BGA,芯片秤和微BGA封装中为焊料凹凸检查提供了很大的通知。

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