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HAST applications: acceleration factors and results for VLSI components

机译:Hast应用程序:VLSI组件的加速因子和结果

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Results and acceleration factors between several highly accelerated stress test (HAST) conditions and 85 degrees C/85% relative humidity tests are given for NMOS EPROMs (erasable programmable read-only memories) and CMOS RAMs (random-access memories). Two failure regimes exist in time: the earliest is below 25% cumulative failures and is due to passivation defects; beyond that, failures are due to passivation moisture saturation or wearout. Results are sensitive to device/process, passivation integrity, and test apparatus cleanliness. Failure predictions are dependent on which failure regime is used.
机译:结果和加速因子在几个高度加速的应力测试(Hast)条件和85摄氏度的相对湿度测试之间进行了NMOS EPROM(可擦除可编程只读存储器)和CMOS RAM(随机访问存储器)。两个失败制度及时存在:最早的低于25%的累积失败,并且是由于钝化缺陷;除此之外,失败是由于钝化水分饱和度或磨损。结果对设备/过程,钝化完整性和测试装置清洁敏感。失败预测取决于使用哪个故障制度。

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