Micrawave/Millimeter- Wave MEMS- Based Multiport Switches and Switch Matrices

摘要

This paper reviews currently available technologies for microwave/millimeter-wave switches with a focus on MEMS switches. In particular, it outlines the research efforts carried-out and the results obtained over the period 2002–2008 to develop MEMS multiport switches and switch matrices. It also surveys MEMS-based switches developed for high-power applications as well as MEMS switches capable of operating up to 60 GHz.