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Fabrication of Thin-Film WO_3 Sensors and Their Sensing Properties to Dilute NO_2

机译:薄膜WO_3传感器的制造及其传感性能稀释NO_2

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摘要

We tried to fabricate WO_3 thin-film sensors using four kinds of WO_3 particles with very different crystalline morphologies (spherical, disk, cuboid, and hexagonal). Using highly dispersive suspensions prepared, WO_3 thin films of 1.5 - 3.0 μm in mean thickness were obtained by micro-injecting film formation method. NO_2 sensing properties of these thin-film sensors suggested that the sensitivity to NO_2 as well as the rate of response-recovery depended markedly on morphology and microstructure of the WO_3 crystals contained.
机译:我们尝试使用具有非常不同的晶体形态(球形,盘,长方体和六边形)的四种WO_3颗粒来制造WO_3薄膜传感器。使用高度分散的悬浮液制备,通过微注射膜形成方法获得均匀厚度为1.5-3.0μm的WO_3薄膜。 NO_2这些薄膜传感器的感测性质表明,对NO_2的敏感性以及响应率恢复的速度明显依赖于所含有的WO_3晶体的形态和微观结构。

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