Evolution of Bosch Inertial Measurement Units for Consumer Electronics

摘要

MEMS based Inertial Measurement Units (IMUs) are being widely used in consumer electronic devices for a large variety of applications. We provide an overview of three generations of IMUs developed at Bosch in the past years. Significant progress of design and technology has been made in electronics, micromechanics, and system integration. We discuss some of the technical challenges and achievements leading to improvements in key parameters like package size, power consumption, and performance.