High-precision absolute laser interferometer distance measurement system

摘要

With the improvement of precision in various fields, we increase high requirements for measurement accuracy. In this paper, we obtain the interference fringes change information (the distance information) with the help of laser scanning with different frequency. This interference method is an absolute measurement. It does not require the target to move in the direction of measurement. In this paper, we give a detailed analysis of the theory. We have done experiments to compare this new method's results with the results of RENISHAW interferometer. It's improved that the accuracy of distance measurement is 10~(-4)～10~(-5) relatively.