Experimental investigation on processing of fused silica microchannels by high repetition rate femtosecond laser

摘要

Femtosecond laser processing has been extensively used in micromachining, especially for theprecision processing of hard and brittle materials. However, the precision of the materials ablated byfemtosecond laser is not easy to control. This paper reports an experimental and theoretical study onthe ablation characteristics of fused silica using high repetition rate femtosecond laser. Anexperimental study of microchannels milling on the fused silica was carried out. The influence of pulseenergy, repetition rate, scanning velocity, scanning times on the size and morphology of themicrochannels was obtained. Simultaneously, the experimental data on the depth and width ofmicrochannels under different parameter combinations were acquired through the orthogonalexperiment. The prediction model of aspect ratio was obtained by BP neural network algorithm.Finally, the verification test was established and showed that the experimental results were consistentwith the theoretical results. It would provide a theoretical basis for further study on the microchannelsfabrication of femtosecond laser.