Enhancement of UV laser induced etching of diamond under vacuum

机译：真空下紫外激光诱导金刚石刻蚀的增强

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An investigation into UV two-photon etching of diamond surfaces in low pressure conditions is presented. A tenfold increase in etch rate was observed, attributed to the reduced role of water vapour in suppressing carbon ejection.

机译：提出了在低压条件下对金刚石表面进行紫外线双光子刻蚀的研究。观察到蚀刻速率增加了十倍，这归因于水蒸气在抑制碳喷射中的作用降低。

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《Conference on Lasers and Electro-Optics Pacific Rim》|2020年|1-2|共2页
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C. G. Baldwin; J. E. Downes; R. P. Mildren;
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入库时间 2022-08-26 14:35:42

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1. Enhanced etch rate of deep-UV laser induced etching of diamond in low pressure conditions [J] . C. G. Baldwin, J. E. Downes, R. P. Mildren Applied Physics Letters . 2020,第11期

机译：在低压条件下增强深紫外激光诱导钻石的蚀刻速度
2. Enhancement of laser-induced damage threshold of optical coatings by ion-beam etching in vacuum environment [J] . Xiulan Ling, Shenghu Liu, Xiaofeng Liu Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2020,第期

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3. Surface microstructuring of silica glass by laser-induced backside wet etching with a DPSS UV laser [J] . Hiroyuki Niino, Yoshizo Kawaguchi, Tadatake Sato, Applied Surface Science . 2007,第19期

机译：使用DPSS UV激光通过激光诱导的背面湿法蚀刻对石英玻璃进行表面微结构化
4. Pulsed Femtosecond Excimer Laser-Induced Chemically Clean Etching of Diamond [C] . A.P.Malshe, A, .M.Ozkan, Advances in laser ablation of materials . 1998

机译：飞秒飞秒准分子激光诱导金刚石的化学刻蚀
5. Micromachining of borosilicate glass and laser induced backside wet etching of quartz using an excimer laser (248 nm). [D] . Kanbargi, Ganesh P. 2005

机译：使用准分子激光（248 nm）对硼硅酸盐玻璃进行微加工，并通过激光诱导对石英进行背面湿蚀刻。
6. Etching-Assisted Ablation of the UV-Transparent Fluoropolymer CYTOP Using Various Laser Pulse Widths and Subsequent Microfluidic Applications [O] . Keisuke Nemoto, Yasutaka Hanada 2018

机译：使用各种激光脉冲宽度和随后的微流体应用对紫外透明含氟聚合物CYTOP进行蚀刻辅助烧蚀
7. Laser-Induced Point Defects in Fused Silica Irradiated by UV Laser in Vacuum [O] . Xiaoyan Zhou, Xinda Zhou, Jin Huang, 2014

机译：用UV激光真空照射熔融二氧化硅的激光诱导点缺陷
8. Hole Formation (Etching) in Polymers by Far (Deep) UV High Intensity Laser (Eximer) Radiation Pulses and Its Relevance to Photoresists in Deep UV Photolysis of Polymers [R] . Jellinek, H. G., Partch, R., Kacki, H. 1988

机译：远（深）紫外高强度激光（准分子）辐射脉冲在聚合物中的孔形成（蚀刻）及其与聚合物深紫外光解中光刻胶的相关性

Enhancement of UV laser induced etching of diamond under vacuum

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