首页> 外文会议>ASME international mechanical engineering congress and exposition >SOLUTION-BASED FABRICATION OF P-CHANNEL AND N-CHANNEL THIN-FILM TRANSISTORS USING RANDOM AND ALIGNED CARBON NANOTUBE NETWORKS
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SOLUTION-BASED FABRICATION OF P-CHANNEL AND N-CHANNEL THIN-FILM TRANSISTORS USING RANDOM AND ALIGNED CARBON NANOTUBE NETWORKS

机译:使用随机和碳纳米管网络的P通道和N通道薄膜晶体管的基于解决方案的制造

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Since discovered in the early 1990s single-walled carbon nanotubes (SWNTs) have attracted significant attention for many research fields. In the long term micro-and nano-electronics are considered to be one of the most valuable applications of SWNTs. The development of the next generation devices involves the mass fabrication and integration of SWNT field-effect transistors (FETs) to form logic gates which are the basic units of integrated circuits (ICs). To create logic gates both p- and n-type SWNT FETs are needed. However the SWNT FETs are typically p-type in air without special treatment with holes as the majority charge carriers in SWNTs. Here in this paper we investigate the p-channel and n-channel SWNT FETs using two solution-based fabrication processes. One method is to use layer-by-layer self-assembly to create SWNT random networks and the other is based on dielectrophoresis-aligned SWNTs. A low-cost easy-to-control method is introduced to convert p-type FETs to n-type. By coating a polyethylenimine (PEI) layer on the surface the transistor demonstrates the typical n-channel characteristics. The resulting devices are air-stable outside a vacuum or an inert environment. The combination of the simple fabrication methods easy conversion of the devices and satisfactory device performance can promote further development of nanotube-based electronics.
机译:自从1990年代初发现单壁碳纳米管(SWNT)以来,在许多研究领域都引起了极大的关注。从长远来看,微电子和纳米电子被认为是单壁碳纳米管最有价值的应用之一。下一代设备的开发涉及SWNT场效应晶体管(FET)的大规模制造和集成,以形成逻辑门,逻辑门是集成电路(IC)的基本单元。为了创建逻辑门,需要p型和n型SWNT FET。但是,SWNT FET在空气中通常为p型,没有经过特殊处理,带有孔,这是SWNT中的主要电荷载流子。在本文中,我们使用两种基于解决方案的制造工艺来研究p沟道和n沟道SWNT FET。一种方法是使用逐层自组装来创建SWNT随机网络,另一种方法是基于介电电泳对齐的SWNT。引入了一种低成本,易于控制的方法来将p型FET转换为n型。通过在表面上涂覆聚乙烯亚胺(PEI)层,晶体管表现出典型的n沟道特性。所得装置在真空或惰性环境中是空气稳定的。简单的制造方法,易于转换的器件以及令人满意的器件性能的组合可以促进基于纳米管的电子器件的进一步发展。

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