Optimal design and control of a voice coil motor driven flexure hinge for AFM actuator

摘要

A systemic design procedure of general VCM (Voice Coil Motor) to fine z-axis AFM (Atomic Force Microscopy) actuator is introduced for fast and precision actuation. Design parameters are selected based on the dynamic model of VCM and flexure hinge, and design process is proceeded in point of fast and precision actuation performances. To verify the performance of the designed actuator, frequency response of the actuator and contact type AFM image of a standard grid sample are performed.