Fabrication of ionic polymer-metal actuator of microcantilever type

摘要

In this study, in order to develop fabrication process of ionic polymer-metal composite (IPMC) actuator of microcantilever type, we evaluated actuation characteristics of a thin film type IPMC. Though its displacement was smaller than that of IPMCs fabricated by using the commercial ionic polymer (Nafion) film, the actuation of the thin film type IPMCs was confirmed. It depended on the thickness of the Nafion layer. We can expect the realization of MEMS devices integrated with the thin film type micro IPMCs fabricated by the propose method.