The technology of the space development has been developed. However the accident of the discharge on solar array ofthe satellite is one of the severe problems. The method of mitigating discharges is needed for on the solar array ofspacecraft. The Electron-emitting film (ELF), which emits the field emission electrons in order to control satellitecharging, has been developed. The purpose of this study is to develop the field emission microscope for the ELFdevice. This system can measure the shape of the ELF device and the field emission electrons current by means ofapplying voltage between an electrode and the ELF device with a distance of tens of micrometer.
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