Clarification and Countermeasures of Electrostatic Discharge in High-Pressure Spray Cleaning During Flat-Panel Display Manufacturing

摘要

High-pressure spray cleaning during the manufacture of flat-panel displays has the problem of electrostatic discharge. In this study, we clarified the factors that create the static electricity generated from high-pressure sprays. Further, a counter voltage was applied to the nozzle, and the water was heated to reduce the charges.