Employing model based failure mode and effect analysis for sputtering process

摘要

This contribution introduces Failure Mode and Effect Analysis (FMEA) method applied to sputtering process. A model based paradigm is used for executing the FMEA method. The Authors employ this approach for increasing its efficiency and productivity. This work builds on the achievements resulting from the previous works concerning applying the Model Based FMEA method for the technological processes and products. In this article we present a knowledge model of sputtering process as well as meta-model of process generally. Finally, the report of potential defects, causes, consequences and provisions for investigating sputtering process in the FMEA sheet form is presented.