Thermal based flow sensor with nearly zero temperature dependence and MID-based flow channel

摘要

For the first time, a resistance based flow sensor is presented, which shows nearly zero temperature dependence in the flow output signal without the need of complex compensation, due to both the unique sensor design and a new packaging technology approach. The improvements are achieved by designing a full Wheatstone bridge out of four platinum resistors and driving the sensor with a constant current source. Moreover, a Molded-interconnected-device (MID) fabricated housing is introduced, defining a highly reproducible flow channel and allowing an easy integration into systems by simply soldering the sensor system to a Printed Circuit Board (PCB).