Needle-Type 5μm Pixel Pitch pH-Image Sensor and Imaging of Proton Emissions in the Cerebral Cortex

摘要

We developed a $256imes 32$-pixel needle-type pH image sensor to visualize ion behavior at the cellular level under in vivo conditions. This sensor has a pixel configuration that can be fabricated via a modified CMOS process technology, and it achieved a pixel size of $5.65imes 4.39 mu mathrm{m}^{2}$. The proposed image sensor is the highest-definition implantable ion image sensor among other conventional image sensors. For in vivo implantation, the sensor's shape was modified to a needle structure of $9.88imes 1.10 ext{mm}^{2}$ with a thickness of $100 mu mathrm{m}$. From the measurement results, we verified that the sensor exhibits a high spatiotemporal resolution with a pH sensitivity, pH resolution, and temporal resolution of 56.4 mV/pH, 0.015 pH, and 14.1 fps, respectively. In addition, we detected pH changes in the brain of the experimented mouse during neural hyperexcitation, and successfully reproduced the measured data as 2-D images in real time.