STRUCTURAL DESIGN OF MICRO-AND NANO-MECHANICAL RESONATORS: ROLE OF THERMOELASTIC DAMPING AND INTERNAL FRICTION

摘要

Micromechanical and nanomechanical resonators are the critical components of numerous microelectromechanical systems (MEMS) used for sensing, communications, imaging, and energy harvesting. Many of these applications require devices that exhibit very high quality factors (Q) of resonance ranging from ten thousand to a million. This paper discusses the mechanisms of energy dissipation that dictate the value of Q, with emphasis on the role of thermoelastic damping and internal friction.