Fluidized-bed jet mill for controlling granule morphology of ultra-fine SiC

摘要

Granule morphology exerts great influences on many properties of particle clusters. To obtain diversified particle shapes under different experimental conditions, theoretical analysis and experimental study were carried out on the processing of ultra-fine SiC (semiconductor materials) with fluidized bed jet mill according to the application environment. Special attention was paid to the main factors for controlling particle shapes. The shaping technique after process and the pretreatment techniques before ultra-fine process were also presented. The results show that well spherical or rhombus-like particles could also be obtained under varied experimental conditions of fluidized-bed jet mill. Experimental investigations into primary factors showed that particle shapes are correlated with jet mill structure (nozzle quantity), manipulated variables (comminuting intensity, gas-solid concentration, pressure, grinding time), and particle properties (granular size)