A fast tool servo feeding mechanism of a swing feed ultra precision diamond turning machine

摘要

A fast tool servo feed mechanism is designed to facilitate the machining of precision large aspheric surface components with big asphericity and profile precision with sub-micron accuracy on a swing feed ultra-precision diamond turning machine. The swing feed ultra-precision diamond turning machine incorporates a swing arm that allows the cutting tool to rotate around the axis of hydraulic motor which is not parallel to the axis of spindle which workpiece is installed one to enable the machining of spherical surface, and accurately machining of aspheric surface parts often requires that the cutting tool can move precisely along the spherical surface normal. The fast tool servo realizes the tool position using flexures with high stiffness that is designed using finite element analyses. The flexures are driven by piezo actuators, which provides a position accuracy of 55 nm.