Driving Circuit Design of Constant-Temperature TypeMicro Thermal Flow Sensor

摘要

We designed an electric circuit and calculated a hot wire characteristic to reduce electric power consumption,for a new constant – temperature type micro thermal flow sensor. The sensor, measuring 3 × 3 mm andcontained a thin platinum line, was fabricated with micro machining technologies. This sensor realized toreduce electric power consumption at steady flow condition. Additionally, this sensor can follow up to 10Hz ofsinusoidal flow rate change.