Design of a chip based microanalytical fluidic system based on electrochemical detection using redox cycling

摘要

Microelectrodes on a chip have been investigated regarding their usefulness for dual electrode amperometric detection in off-chip and on-chip based microanalytical capillary flow systems. In the latter case, microelectrodes were integrated on a chip containing fluidic channels. A straigntforward method to micromechaniclly manufacture the chips is presented. In this process, the microelectrodes are manufactured on a Pyrex (Corning #7740) glass wafer and anodically bonded to an oxidized silicon wafer into which fluidic channels of varying width and depth have been manufactured.