The Development of Scratch Resistant Diamond-Like Nanocomposite Based Coatings for Mobile Displays

摘要

In this work, we report on the development of durable, anti-scratch coatings for mobile displays with an inline plasma ion source technology. Diamond-like nanocomposite (DLN) films were investigated due to their unique tailorability for optical clarity, high hardness, low residual stress, scratch resistance, hydrophobicity, and adhesion to a variety of substrates. High-density plasma is generated in the interior of the plasma source by an inductively coupled large-area antenna. A quasi-neutral beam of energetic ions are accelerated from the source by a single grid extraction system. The source design allows for independent control of ion fluxes and energies to optimize film properties. DLN films were deposited with siloxane-based precursor chemistries introduced downstream of the source without the requirement for substrate bias. DLN films were deposited on glass and polymeric substrates employed as cover glass for mobile displays. The deposited films were characterized to determine their optical, mechanical, and hydrophobic properties. Specifically, results will be presented of the films refractive index, absorption, hardness, elastic modulus, and water contact angle. Film performance will be correlated with plasma source conditions and relevant process parameters.