Sputtering as well as ion-beam enhanced recrystallization and grain growth in tin, polycrystalline Ag films irradiated with Ar~+ and Xe~+ ions has been investigated, using Rutherford Backscattering Spectroscopy in random (RBS) and channeling geometry (RBS-C) and Scanning Tunneling Microscopy (STM). The ion irradiations were carried out at 20, 77 and 300 K. At T<= 77 K, a pronounced texturing of the grains along the incident beam axis was detected which was much weaker after the 300 K irradiation. The sizes and shapes of the Ag grains after irradiation were found to depend on the ion fluence and temperature. The relevance of thermal spickes in these processes is being emphasized.
展开▼
