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Nanometer-Order Control of MEMS Ribbons for Blazed Grating Light Valves

机译:炽热光栅光阀MEMS带的纳米级控制

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摘要

The performance of grating light valve (GLV™) chips can be increased by optimizing their ribbon structures [ 1]. A GLV is a one-dimensional light modulator using diffraction that can be applied to a high definition display by scanning the second dimension. We applied blazed GLV, which diffracts in only one direction [ 2], and achieved a jump in contrast from 3000:1 to 10000:1. Moreover, we achieved a 55 to 70% improvement in optical efficiency due to nanometer-order control of blazed GLV ribbon. These technologies were applied to the 2005-inch theater system “ GxL™ Laser Dream Theater” [ 3, 4].
机译:光栅光阀(GLV™)芯片的性能可以通过优化其带状结构来提高[1]。 GLV是使用衍射的一维光调制器,可以通过扫描第二维将其应用于高清晰度显示器。我们应用了炽热的GLV,它仅在一个方向上发生衍射[2],并且对比度从3000:1跃升至10000:1。此外,由于对发光的GLV色带进行了纳米级控制,我们的光学效率提高了55%至70%。这些技术已应用于2005英寸的影院系统“ GxL™Laser Dream Theater” [3,4]。

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