This article presents an extended modeling approach for piezoelectric tube actuators combining Finite Element Analysis (FEA) and model order reduction (MOR) techmniques. The model includes the full coupling between motion in all axes, while the reduced model order, which depends mainly on the desired bandwith and model accuracy, makes it a suitable basis for controller design purposes. Simulation results in the frequency domain are compared to measurements and show an excellent agreement in a wide frequency range. The increase of scan accuracy in closed-loop operation is demonstrated by simulation data of a model-based H controller.
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