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Effective electromechanical coupling coefficient and quality factor control by the layer arrangement of 1.8-GHhz range film bulk acoustic wave resonators composed of ZnO, SiO/sub 2/ and Al/sub 2/O/sub 3/ thin films

机译：通过由ZnO，SiO / sub 2 /和Al / sub 2 / O / sub 3 /薄膜组成的1.8-GHhz范围薄膜体声波谐振器的层布置，有效地机电耦合系数和品质因数控制

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《》|2005年|P.1820-1823|共4页
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Takeuchi; M.; Yamada; H.; Kawamura; H.; Yoshino; Y.; Makino; T.; Arai; S.;
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1. Effective electromechanical coupling coefficient (kt(2)) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film [J] . Takeuchi M., Yamada H., Yoshino Y., Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2002,第3a4期

机译：由ZnO薄膜制成的厚度扩展模式薄膜体声波谐振器的基本模式的有效机电耦合系数（kt（2））
2. Electrode influence on effective electromechanical coupling coefficient of thin film bulk acoustic resonators [J] . Zhang R., Jiao X. -Q., Yang J., Materials Research Innovations . 2014,第suppla4期

机译：电极对薄膜体声波谐振器有效机电耦合系数的影响
3. Carbon nanotube isolation layer enhancing in-liquid quality-factors of thin film bulk acoustic wave resonators for gravimetric sensing [J] . Girish Rughoobur, Hisashi Sugime, Mario DeMiguel-Ramos, Sensors and Actuators . 2018,第may期

机译：碳纳米管隔离层提高了重力感应薄膜体声波谐振器的液体质量因数
4. Effective electromechanical coupling coefficient and quality factor control by the layer arrangement of 1.8-GHhz range film bulk acoustic wave resonators composed of ZnO, SiO/sub 2/ and Al/sub 2/O/sub 3/ thin films [C] . Takeuchi M., Yamada H., Kawamura H., IEEE Ultrasonics Symposium . 2005

机译：由ZnO，SiO / Sub 2 / Sub 2 / Sub 3 / Sim 3 / Sim 3 / Sim 3 / Sim 3 / Sim 3 / Sim 3 / Sim 3 /薄膜层布置的有效机电耦合系数和质量因子控制。
5. Film Bulk Acoustic Resonators of High Quality Factors in Liquid Environments for Biosensing Applications. [D] . Xu, Wencheng. 2011

机译：用于生物传感应用的液体环境中高质量因子的薄膜体声谐振器。
6. Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator [O] . Jian Li, Mengwei Liu, Chenghao Wang 2016

机译：高泛音体声波谐振器有效机电耦合系数的共振谱特性
7. High coupling piezoelectric thin films of Pb(Zr,Ti)O-3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators [O] . Yamauchi N., Shirai T., Yoshihara T., 2009

机译：用于GHz范围薄膜体声谐振器的Pb（Zr，Ti）O-3-基三元钙钛矿化合物的高耦合压电薄膜

Effective electromechanical coupling coefficient and quality factor control by the layer arrangement of 1.8-GHhz range film bulk acoustic wave resonators composed of ZnO, SiO/sub 2/ and Al/sub 2/O/sub 3/ thin films

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