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Fast-MoM based 2D and 3D rigorous models for the analysis of cantilever deflections in micromachined structures

机译:基于Fast-MoM的2D和3D严格模型,用于分析微机械结构中的悬臂挠度

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In this work we derive several equivalent representations for the Green's functions (GFs) associated with elastostatic problems. The resulting GFs allow the application of the Fast-MoM which is an extension of the widely-used Method of Moments. The Fast-MoM, a "data-recycling" scheme, enables accurate and fast computations based on precalculated Universal Functions (UFs). The UFs allow the application of an iterative procedure for the calculation of small- and large amplitude cantilever deflections in micromachined structures as we proposed at this conference two years ago.
机译:在这项工作中,我们得出了与弹性静力学问题相关的格林函数(GFs)的几种等效表示形式。生成的GF允许应用Fast-MoM,这是广泛使用的矩量法的扩展。 Fast-MoM是一种“数据回收”方案,可基于预先计算的通用函数(UF)进行准确而快速的计算。如我们两年前在本次会议上所提议的那样,UF允许应用迭代程序来计算微机械结构中的小幅度和大幅度悬臂梁挠度。

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