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A method of quantitative defect analysis and yield forecast by an advanced kill rate from line monitoring data

机译:一种基于生产线监测数据的高级缺陷率定量缺陷分析和产量预测的方法

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This paper presents a method for quantitative defect analysis and yield forecast by using a new kill rate from line monitoring data. This kill rate is based on the average of kill rates from dice with the same numbers of the same type of defect occurrences on a die. A simulation study indicated that this new method is superior to conventional methods for multiple defect occurrences on a die.
机译:本文提出了一种使用在线监测数据中新的死亡率来进行定量缺陷分析和产量预测的方法。此杀死率是基于在裸片上具有相同数量且相同类型的缺陷出现次数的骰子的杀死率的平均值。仿真研究表明,这种新方法优于常规方法,可以在模具上多次出现缺陷。

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