We present a modeling methodology for conceptual design and simulation of automated material handling systems (AMHS) in semiconductor manufacturing. This methodology integrates the conceptual design and modeling processes. This results in a reduction in modeling cycle time. The modeling process utilizes a simulator, selected from a suite, which is coupled with a design tool. The design tool, an in-house expert system helps in preliminary analysis of and selection among several alternatives. The design tool then generates appropriate data files to be used by a simulator. A simulator, built using Automod II, represents in AMHS in terms of layout, vehicle control logic, and material flow. We discuss the architecture of a simulator in detail and present a case study. We have developed a set of simulators to handle different vehicle control algorithms.
展开▼
