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High Purity LP-MOVPE Process of Ill/V Compounds Using an Inert Carrier Gas with Drastically Reduced Hazards

机译：使用惰性载气并大幅降低危害的高纯度LP / MOVPE工艺用于病/ V化合物

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《》|2001年|P.143-143|共1页
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Hergeth; J.; Lengeling; G.;
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中图分类无线电电子学、电信技术;
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4. High Purity LP-MOVPE Process of Ill/V Compounds Using an Inert Carrier Gas with Drastically Reduced Hazards [C] . Hergeth J., Lengeling G., Institute of Electric and Electronic Engineer International Conference Metalorganic Vapor Phase Epitaxy . 2001

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High Purity LP-MOVPE Process of Ill/V Compounds Using an Inert Carrier Gas with Drastically Reduced Hazards

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