Zone Controlled Induction Heating (ZCIH) A New Concept in Induction Heating

摘要

This paper proposes a new "zone controlled induction heating" (ZCIH) system. The ZCIH system consists of two or more sets of a high-frequency inverter and a split work coil, which adjusts the coil current amplitude in each zone independently. The ZCIH system has capability of controlling the exothermic distribution on the work piece to avoid the strain caused by a thermal expansion. As a result, the ZCIH system enables a rapid heating performance as well as an temperature uniformity. This paper proposes current phase control making the coil current in phase with each other, to adjust the coil current amplitude even when a mutual inductance exists between the coils. This paper presents operating principle, theoretical analysis, and experimental results obtained from a laboratory setup and a six-zone prototype for a semiconductor processing.