Structure and properties of fluorine doped diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition

摘要

Summary form only given. Fluorine addition to a-C (amorphous carbon) thin films offers many advantages and a deeply understanding of the properties of a-C: F thin films is necessary for applications like biomedical implants and biosensor devices. Fluorine doped diamond-like carbon (a-C:F) films with different fluorine content were fabricated on Si wafer by pulsed vacuum arc plasma deposition. Film composition and structure were characterized by X-ray photoelectron spectroscopy (XPS) and Raman scattering spectroscopy. Surface morphology and roughness were analyzed by atomic force microscopy (AFM). Hardness and scratch resistance were measured by nano-indentation and nano-scratch, respectively. Water contact angles were measured by sessile drop method.