Calibrated scanning spreading resistance microscope (SSRM) on buried-heterostructure multiple-quantum-well lasers: probing individual quantum wells and free carrier concentrations

摘要

Summary form only given. We report the results of calibrated high-spatial-resolution SSRM measurement, showing that we are able to resolve individual quantum wells and determine the activated doping of the p-n-p-n thyristor current blocking layers of a BH MQW laser.