A novel in-slider piezoelectric micro-actuator for hard disc drives

摘要

The newly introduced 2.5/sup th/ generation (2.5G) dual-stage actuator model, three-piece slider incorporating a piezoelectric micro-actuator into a 50% nano-slider to provide ultra-fine positioning capability, is developed and evaluated in combination with the parallel control architecture for a dual-stage actuator servo system, showing high potentiality for the next generation hard disk drive (HDD) applications.