This paper presents a MISFET type hydrogen sensor for detecting dissolved hydrogen in transformer isolation oil. Sensing and reference FETs, a buried resistor type heater, and a p-n junction diode for the temperature control are integrated on a single chip. Measurements are carried out at various hydrogen concentrations in transformer isolation oil. The results show that this detector can be used as a practical hydrogen sensor with an advantage of in-situ real time gas analyzing.
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