Summary form only given. In this paper, we examine etch rates and surface morphology in ultrafast-laser micromachining of /spl sim/1 /spl mu/m diameter holes in fused silica. Shock-induced microcracking was a fundamental limitation of single pulse etching, but could be entirely avoided when mode-locked pulse trains were applied to rapidly micromachined surfaces (at /spl sim/20 /spl mu/m/pulse train).
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机译：仅提供摘要表格。在本文中，我们研究了熔融石英中/ spl sim / 1 / spl mu / m直径孔的超快激光微加工中的蚀刻速率和表面形态。冲击引起的微裂纹是单脉冲蚀刻的基本限制，但是当将锁模脉冲序列应用于快速微加工的表面（/ spl sim / 20 / spl mu / m / pulse train）时，可以完全避免。
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