Integrated micro-electro-mechanical sensor development for inertial applications

摘要

Electronic sensing circuitry and micro-electromechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M/sup 3/EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.