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Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography

机译：通过深蚀刻X射线光刻技术实现的用于微超声换能器的压电复合材料

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《》|1995年||共1页
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Hirata; Y.; Okuyama; H.;
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中图分类无线电电子学、电信技术;
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1. Microfabrication of millimeter wave vacuum electron devices by two-step deep-etch x-ray lithography [J] . Young-Min Shin, Jin-Kyu So, Seong-Tae Han, Applied Physics Letters . 2006,第9期

机译：两步深蚀刻X射线光刻微加工毫米波真空电子器件
2. Characterisation of defects in very high deep-etch x-ray lithography microstructures [J] . F. J. Pantenburg, S. Achenbach, J. Mohr Microsystem technologies . 1998,第2期

机译：非常高的深蚀刻X射线光刻微结构中的缺陷表征
3. Structural changes in poly(methyl methacrylate) during deep-etch X-ray synchrotron radiation lithography Part Ⅱ: Radiation effects on PMMA [J] . Olaf Schmalz, Michael Hess, Robert Kosfeld Die Angewandte Makromolekulare Chemie . 1996,第期

机译：深度腐蚀X射线同步加速器辐射光刻过程中聚甲基丙烯酸甲酯的结构变化第二部分：辐射对PMMA的影响
4. Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography [C] . Hirata Y., Okuyama H., Institute of Electric and Electronic Engineer IEEE Micro Electro Mechanical Systems . 1995

机译：用深蚀刻X射线光刻实现微型超声换能器的压电复合材料
5. Micro-electromagnetic rotary motors realized by deep x-ray lithography and electroplating. [D] . Christenson, Todd Richard. 1995

机译：通过深X射线光刻和电镀实现的微电磁旋转电机。
6. Characterization of piezoelectric ceramics and 1-3 composites for high power transducers [O] . Hyeong Jae Lee, Shujun Zhang, Richard J. Meyer Jr., -1

机译：大功率换能器的压电陶瓷和1-3复合材料的表征
7. Piezoelectric Composite Materials for Ultrasonic Transducer Applications. Part I: Resonant Modes of Vibration of PZT Rod-Polymer Composites [O] . T. R. Gururaja, Walter A. Schulze, Leslie E. Cross, 2014

机译：用于超声换能器应用的压电复合材料。第一部分：pZT棒 - 聚合物复合材料振动的共振模式

Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography

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