The equipment improvement program: a structured methodology for continuous improvement and increased equipment life

摘要

The equipment improvement program, a SEMATECH initiative to help improve the US semiconductor industry's efficient use of capital equipment, is described. This program focuses on continuous performance improvement of existing equipment to meet current and future manufacturing requirements with the goal of extending their useful life by a generation. Working hand-in-hand with suppliers, these programs are aimed at improving equipment reliability, throughput, and yield, thereby decreasing process step costs. Issues related to the industry's growth, strategic direction, cost of capital, and capital productivity are explored.