Modal analyses of loaded waveguides for microwave diagnostics of semiconductors

摘要

The effect of semiconducting sample fitting dimensions on the waveguide measured parameters, and consequently on semiconductor diagnostics, is studied. Modal charts are constructed to show the influence of tolerance fitting (gaps between the sample and guide walls) on the propagation constant. Semiconductor losses are considered. The effect of sample dimensions on the reflection coefficients is analyzed. A diagnostic example is solved to show how the gap size has a great effect on the accuracy of the semiconductor parameters.