Performance Analytical Model for Interbay Material Handling System with Shortcut and Blocking

摘要

To effectively analyze and evaluate the performances of Interbay material handling system with shortcut and blocking in semiconductor fab, an extended Markov chain model (EMCM) has been proposed, in which the system characteristics such as vehicle blockage and system's shortcut configuration are well considered. With production data from Interbay material handling system of a 300mm semiconductor fab, the proposed EMCM is compared with simulation analytic model. The result demonstrates that the proposed EMCM is an effective modeling approach for analyzing Interlay's performances in the early phase of system design.