Modifications in the fabrication technology for the IR thermopile sensor TS-72 comprising the use of appropriate isolation layer material, the introduction of diffusion barriers as well as the soldering of the IR window into the cap and an appropriate chip bonding led to sensors that meet the requirements concerning reliability and long-term stability for the specified field conditions, as proven by long-term tests over more than 10000 hours. Their use in radiation thermometers manufactured in series with a guaranteed permissible maximum ambient temperature of 180℃ has started.
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