Formation of diamond-like films upon exposure of glass interface with liquid aromatic hydrocarbons to a Cu vapor laser radiation

摘要

Amorphous diamond-like films are deposited on transparent substrates upon exposure of its interface with liquid hydrocarbons (C_6H_5CH_3, C_6H_6, and C_6H_5CH(CH_3)_2) to pulsed visible laser radiation of a copper vapor laser ( λ = 510.6 nm). The X-ray Auger electron spectroscopy (XAES), Reflection High Energy Electron Diffraction (RHEED), and Raman analysis are employed to characterize the deposited films. The sp3 fraction in deposited films amounts to 60 - 70 % and depends on the precursor. The average film thickness on a glass substrate is about 200 nm. The films show excellent adherence, are transparent in the visible and have microhardness of 50 - 70 GPa, as measured by nanoindentor.